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Relationship between sensitivity and waveguide position on the diaphragm in integrated optic pressure sensors based on the elasto-optic effect
Relationship between sensitivity and waveguide position on the diaphragm in integrated optic pressure sensors based on the elasto-optic effect
Ohkawa, Masashi
4153
Hasebe, Kazuhiko
4154
Sekine, Seishi
4155
Sato, Takashi
4156
The sensitivities of integrated optic pressure sensors with diaphragms theoretically are known to be strongly dependent on the position of the sensing waveguide on the diaphragm. According to the theoretical results, the diaphragm edge is the best position for the waveguide of a sensor based on the elasto-optic effect. The relationship between sensitivity and the waveguide position, however, has not been investigated experimentally, although it is important in the designing of such a sensor and in determining the misalignment tolerance of the sensing waveguide. In this study, this relationship in a glass-based integrated optic sensor by use of an intermodal interference was examined experimentally.
journal article
Optical Society of America
2002-08
application/pdf
Applied Optics
24
41
5016
5021
Applied Optics
AA00543409
00036935
https://niigata-u.repo.nii.ac.jp/record/1525/files/41_24_5016-5021.pdf
eng
info:doi/10.1364/AO.41.005016
Copyright (C) 2002 Optical Society of America
This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.41.005016. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.