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2022-12-15T04:01:36Z
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Small rotation angle measurement using an imaging method
Small rotation angle measurement using an imaging method
Suzuki, Takamasa
Nakamura, Hideki
Greivenkamp, John E.
Sasaki, Osami
Copyright 1999 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
rotation angle measurement
image processing
fringe projection
n-line measurement
A system of small rotation angle measurement based on the fringe projection is proposed and demonstrated. This system has potential for a broad range of uses and a robustness for the external disturbances, because it requires no coherent light. The setup is very simple and applicable to the automatic on-line measurement. Several measurements indicate a sensitivity of 3 arcsec.
Three-dimensional imaging, optical metrology, and inspection 5 : Conference : Sep 1999, Boston, MA
International Society for Optical Engineering, SPIE
1999-09
eng
conference paper
http://hdl.handle.net/10191/27496
https://niigata-u.repo.nii.ac.jp/records/31063
info:doi/10.1117/12.370258
AA10619755
0277786X
Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of SPIE - the International Society for Optical Engineering
3835
14
21
https://niigata-u.repo.nii.ac.jp/record/31063/files/3835_14-21.pdf
application/pdf
493.2 kB
2019-08-26