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Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile
Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile
Sasaki, Osami
Honma, Kunihiro
Suzuki, Takamasa
Copyright 2002 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
interferometer
wavelength-scanning
step-profile measurement
feedback control
An optical path difference (OPD) and the amplitude of sinusoidal wavelength-scanning are controlled with double feedback control system in an interferometer, so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. A linear CCD image sensor is used to measure one-dimensional step-profiles in real-time. Two different step profiles with a step height of 1 μm and 20 μm, respectively, are measured with the measurement error less than 8 nm. Measuring time for one measuring point is 0.04 s.
Advanced materials and devices for sensing and imaging : 17-18 October 2002, Shanghai, China. : Oct 2002, Shanghai, China
International Society for Optical Engineering, SPIE
2002-10
eng
conference paper
http://hdl.handle.net/10191/27474
https://niigata-u.repo.nii.ac.jp/records/31052
info:doi/10.1117/12.465819
AA10619755
0277786X
Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of SPIE - the International Society for Optical Engineering
4919
227
234
https://niigata-u.repo.nii.ac.jp/record/31052/files/4919_227-234.pdf
application/pdf
622.3 kB
2019-08-26