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Displacement measurement with a dual-colored sinusoidal phase-modulating interferometer
Displacement measurement with a dual-colored sinusoidal phase-modulating interferometer
Suzuki, Takamasa
Sato, Toshihiko
Sasaki, Osami
Copyright 2006 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
displacement measurement
laser diode
interferometry
sinusoidal phase-modulation
Interferometric displacement sensor based on a two-wavelength interferometry is proposed and demonstrated. A combination of time-shared two-wavelength laser diode and sinusoidal phase-modulating interferometry enables us to realize accurate and wide-range displacement measurement with a simple optical setup.
ICO20: optical devices and instruments : 21-26 August 2005 : Changchun, China. : Aug 2005, Changchun, China
International Society for Optical Engineering, SPIE
2005-08
eng
conference paper
http://hdl.handle.net/10191/27481
https://niigata-u.repo.nii.ac.jp/records/31042
info:doi/10.1117/12.666819
AA10619755
0277786X
Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of SPIE - the International Society for Optical Engineering
6024
60240F-1
60240F-6
https://niigata-u.repo.nii.ac.jp/record/31042/files/6024_60240F.pdf
application/pdf
351.2 kB
2019-08-26