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oai:niigata-u.repo.nii.ac.jp:00031020
2022-12-15T04:01:34Z
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Real-time displacement measurement using VCSEL interferometer
Real-time displacement measurement using VCSEL interferometer
Suzuki, Takamasa
Yamada, Noriaki
Sasaki, Osami
Choi, Samuel
Copyright(C)2012 Society of Photo-Optical Instrumentation Engineers
displacement sensor
laser diode
interferometer
vertical cavity surface emitting laser diode
A displacement sensor that uses a vertical cavity surface emitting laser (VCSEL), which is superior in terms of remediation of the mode-hop issue and modulation efficiency, is proposed. The interference signal in the sensor is processed with the phase-locked technique. This device allows real-time measurement of displacement. No unstable signals due to mode-hop were observed in the experiments. Displacement measurements recorded with this device indicated that it has an rms measurement accuracy of 0.3 μm and 50 nm for displacements of 150 μm and 1.2 μm, respectively.
Optical metrology and inspection for industrial applications 2 : 5-7 November 2012 : Beijing, China
International Society for Optical Engineering, SPIE
2012-11
eng
conference paper
http://hdl.handle.net/10191/31149
https://niigata-u.repo.nii.ac.jp/records/31020
info:doi/10.1117/12.999720
AA10619755
0277786X
Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of SPIE - the International Society for Optical Engineering
8563
85630K-1
85630K-6
https://niigata-u.repo.nii.ac.jp/record/31020/files/8563_85630K.pdf
application/pdf
4.6 MB
2019-08-26