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2022-12-15T04:12:29Z
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浮上式流動層CVDによるTiN-Al_2O_3系複合粉末の合成
浮上式流動層CVDによるTiN-Al_2O_3系複合粉末の合成
Synthesis of TiN-Al_2O_3 Composite Powder by Floating-Type Fluidized-Bed CVD
木村, 勇雄
堀田, 憲康
一箭, 健治
齋藤, 夏風
Fluidized-bed CVD
Composite powder
Al_2O_3
TiN
TiCl_4
NH_3
Conductive ceramics
Dispersin
A TiN-Al_2O_3 composite powder was synthesized by the floating-type fluidized- bed CVD. Al_2O_3 particles were floated in an N_2/NH_3 gas mixture, and TiCl_4 was fed to deposit TiN. The composite powders obtained and the ceramics were examined by an electron probe microanalyzer (EPMA). The TiN content in the composite powder was controlled by the flow rate of carrier gas of TiCl_4. It was deduced that the composite powder was formed by deposition of fine TiN particles onto Al_2O_3 particle surfaces, aggregating to about 3μm. Ceramic from the composite powder containing 12.5 wt% TiN was conductive. Its microstructure suggested that TiN was uniformly dispersed as compared with mechanical mixing.
日本セラミックス協会
1989-12
jpn
journal article
http://hdl.handle.net/10191/6816
https://niigata-u.repo.nii.ac.jp/records/3576
AN10040326
09145400
日本セラミックス協会学術論文誌
日本セラミックス協会学術論文誌
97
12
1525
1529
https://niigata-u.repo.nii.ac.jp/record/3576/files/2009030025.pdf
application/pdf
871.8 kB
2019-07-30