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Sinusoidal phase modulating laser diode interferometer with a feedback control system to eliminate external disturbance
Sinusoidal phase modulating laser diode interferometer with a feedback control system to eliminate external disturbance
Sasaki, Osami
Takahashi, Kazuhide
Suzuki, Takamasa
Copyright 1990 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
laser diodes
interferometry
feedback control
displacement metrology
surface metrology
surface profiles
We propose a sinusoidal phase modulating laser diode interferometer that is insensitive to vibrations of the optical components and fluctuations in the optical wavelength of the laser diode. These external disturbances cause fluctuations in the phase of the interference signal. After we analyze the sinusoidal phase modulation in a laser diode interferometer, we describe the method of the feedback control of the injection current of the laser diode to eliminate the phase fluctuations of the interference signal We construct two sinusoidal phase modulating interferometers for movement measurements and surface profile measurements, respectively. The experimental results make it clear that the interferometers work well in mechanically noisy circumstances.
International Society for Optical Engineering, SPIE
1990-12
eng
journal article
http://hdl.handle.net/10191/27591
https://niigata-u.repo.nii.ac.jp/records/2224
info:doi/10.1117/12.55754
AA00333891
00913286
Optical Engineering
Optical Engineering
29
12
1511
1515
https://niigata-u.repo.nii.ac.jp/record/2224/files/29_12_1511-1515.pdf
application/pdf
497.4 kB
2019-07-29