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Real-time two-dimensional surface profile measurement in a sinusoidal phase-modulating laser diode interferometer
Real-time two-dimensional surface profile measurement in a sinusoidal phase-modulating laser diode interferometer
Suzuki, Takamasa
Sasaki, Osami
Kaneda, Jinsaku
Maruyama, Takeo
Copyright 1994 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
interferometer
laser diode
sinusoidal phase modulation
image sensor
A real-time 2D surface profile measurement system is described. In this system, a laser diode and a 2D charge-coupled device image sensor are used as a light source and a photodetector, respectively. The phase is detected from the sinusoidal phase-modulating interference signal using the high-speed electrical circuit. The time required for phase detection is 20 ms for 50 X 40 measuring points. Because the phases can be obtained for even and odd fields of the image sensor, the original spatial resolution of the image sensor is not reduced in this system. Repeatability of the measurements is approximately 14 nm, rms.
International Society for Optical Engineering, SPIE
1994-08
eng
journal article
http://hdl.handle.net/10191/27603
https://niigata-u.repo.nii.ac.jp/records/2222
info:doi/10.1117/12.173561
AA00333891
00913286
Optical Engineering
Optical Engineering
33
8
2754
2759
https://niigata-u.repo.nii.ac.jp/record/2222/files/33_8_2754-2759.pdf
application/pdf
684.4 kB
2019-07-29