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Two-dimensional small-rotation-angle measurement using an imaging method
Two-dimensional small-rotation-angle measurement using an imaging method
Suzuki, Takamasa
Endo, Takanori
Sasaki, Osami
Greivenkamp, John E.
Copyright 2006 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
rotation-angle measurement
fringe projection
two-dimensional grating
Fourier transform method
A two-dimensional small-rotation-angle measurement system based on fringe projection is proposed and demonstrated. Simple and effective signal processing is described and applied to the angular calculation. Several measurements indicate a measurement accuracy of ≍ 0.4 arcsec, which is comparable to that of a high-priced autocollimator. The two-dimensional two-pitch grating used in our prototype system provides a wide measurement range, which is expected to reach 1300 arcsec for both x- and y-direction rotations.
International Society for Optical Engineering, SPIE
2006-04
eng
journal article
http://hdl.handle.net/10191/27610
https://niigata-u.repo.nii.ac.jp/records/2200
info:doi/10.1117/1.2188945
AA00333891
00913286
Optical Engineering
Optical Engineering
45
4
043604_1
043604_7
https://niigata-u.repo.nii.ac.jp/record/2200/files/45_4_043604.pdf
application/pdf
714.5 kB
2019-07-29