2024-03-29T02:10:31Z
https://niigata-u.repo.nii.ac.jp/oai
oai:niigata-u.repo.nii.ac.jp:00001547
2022-12-15T03:34:10Z
423:424:425
453:454
Phase locked laser diode interferometry for surface profile measurement
Phase locked laser diode interferometry for surface profile measurement
Suzuki, Takamasa
Sasaki, Osami
Maruyama, Takeo
© 1989 Optical Society of America
This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.28.004407. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
We propose a new type phase locked interferometer which uses tunability of the wavelength of a laser diode. The phase lock is achieved by controlling the injection current of the laser diode. A CCD image sensor is used as a photodetector to scan electrically a measuring point along the surface of the object. Since this interferometer uses no mechanical elements such as a piezoelectric transducer and galvanomirror, the measurement accuracy is not limited by the mechanical properties. The characteristics of the feedback control system for the phase lock are examined through measurements of surface profiles of the diamond-turned aluminum disks.
Optical Society of America
1989-10
eng
journal article
http://hdl.handle.net/10191/27501
https://niigata-u.repo.nii.ac.jp/records/1547
info:doi/10.1364/AO.28.004407
AA00543409
00036935
Applied Optics
Applied Optics
28
20
4407
4410
https://niigata-u.repo.nii.ac.jp/record/1547/files/28_20_4407-4410.pdf
application/pdf
406.3 kB
2019-07-29