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Double sinusoidal phase-modulating laser diode interferometer for distance measurement
Double sinusoidal phase-modulating laser diode interferometer for distance measurement
Sasaki, Osami
Yoshida, Tadahiko
Suzuki, Takamasa
© 1991 Optical Society of America
This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.30.003617. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
Sinusoidal phase-modulating interferometry is used to detect exactly the sinusoidal phase variation of an interference signal even when the amplitude of the interference signal is varied by modulation of the injection current. We can easily provide a sinusoidal phase-modulating interferometer with a feedback control system that eliminates the phase fluctuations caused by mechanical vibrations. The methods using sinusoidal phase-modulating interferometry improve the resolution of distance measurements. Experimental results show that the thickness of gauge blocks is measured with a resolution of ~ 0.5 μm.
Optical Society of America
1991-09
eng
journal article
http://hdl.handle.net/10191/27517
https://niigata-u.repo.nii.ac.jp/records/1543
info:doi/10.1364/AO.30.003617
AA00543409
00036935
Applied Optics
Applied Optics
30
25
3617
3621
https://niigata-u.repo.nii.ac.jp/record/1543/files/30_25_3617-3621.pdf
application/pdf
544.9 kB
2019-07-29