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Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer
Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer
Suzuki, Takamasa
Kobayashi, Katsuyuki
Sasaki, Osami
© 2000 Optical Society of America
This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.39.002646. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
A two-wavelength interferometer that uses two separate modulating currents with different phases but the same frequencies to detect a greater degree of object displacement in real time is proposed and demonstrated. The measurement error was 57 nm, roughly 1/80 of the synthetic wavelength. We have confirmed that this modulating technique enables us to equip our prototype interferometer with a simple feedback-control system that eliminates external disturbance.
Optical Society of America
2000-06
eng
journal article
http://hdl.handle.net/10191/27511
https://niigata-u.repo.nii.ac.jp/records/1532
info:doi/10.1364/AO.39.002646
AA00543409
00036935
Applied Optics
Applied Optics
39
16
2646
2652
https://niigata-u.repo.nii.ac.jp/record/1532/files/39_16_2646-2652.pdf
application/pdf
666.2 kB
2019-07-29