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Phase-locked phase-shifting laser diode interferometer with photothermal modulation
Phase-locked phase-shifting laser diode interferometer with photothermal modulation
Suzuki, Takamasa
Zhao, Xuefeng
Sasaki, Osami
© 2001 Optical Society of America
This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.40.002126. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
We propose a phase-shifting interferometer that uses both phase-locked and photothermal modulating techniques. In this interferometer the measurement accuracy is not affected by the intensity modulation that usually appears in current modulation. The surface profile of a diamond-turned aluminum disk was measured; the rms repeatability obtained was lambda/460.
Optical Society of America
2001-05
eng
journal article
http://hdl.handle.net/10191/27505
https://niigata-u.repo.nii.ac.jp/records/1529
info:doi/10.1364/AO.40.002126
AA00543409
00036935
Applied Optics
Applied Optics
40
13
2126
2131
https://niigata-u.repo.nii.ac.jp/record/1529/files/40_13_2126-2131.pdf
application/pdf
622.5 kB
2019-07-29