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Two-wavelength laser diode interferometer with time-sharing sinusoidal phase modulation
Two-wavelength laser diode interferometer with time-sharing sinusoidal phase modulation
Suzuki, Takamasa
Yazawa, Takayuki
Sasaki, Osami
© 2002 Optical Society of America
This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.41.001972. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
We describe an interferometer system that uses two separate wavelengths to measure step height. The overlapping interference images detected by a CCD camera are easily separated by an ordinary integrating-bucket method and time-sharing sinusoidal phase modulation, in which two laser diodes are alternately modulated with a sinusoidal signal. A phase map is obtained only for the laser diode into which the modulation signal is injected. In this instance, a 1-microm step height was accurately detected.
Optical Society of America
2002-04
eng
journal article
http://hdl.handle.net/10191/27526
https://niigata-u.repo.nii.ac.jp/records/1528
info:doi/10.1364/AO.41.001972
AA00543409
00036935
Applied Optics
Applied Optics
41
10
1972
1976
https://niigata-u.repo.nii.ac.jp/record/1528/files/41_10_1972-1976.pdf
application/pdf
596.3 kB
2019-07-29