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Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam
Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam
Shinozaki, Ryo
Sasaki, Osami
Suzuki, Takamasa
© 2004 Optical Society of America
This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.43.004157. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
A fast scanning method for one-dimensional surface profile measurement is proposed. The profile is measured by integration of a slope distribution of the surface obtained from angular deflection of a scanning laser beam. A scanning optical system that consists principally of a spherical concave mirror and a rotating scanner mirror has reasonably low cost and is insensitive to mechanical vibration because of its high-speed scanning, of the order of milliseconds. A surface profile of a polygonal mirror along a 5-mm width was measured with the scanning method and with an interferometer. The root-mean-square difference between the two measured results is 0.98 nm.
Optical Society of America
2004-07
eng
journal article
http://hdl.handle.net/10191/27514
https://niigata-u.repo.nii.ac.jp/records/1522
info:doi/10.1364/AO.43.004157
AA00543409
00036935
Applied Optics
Applied Optics
43
21
4157
4163
https://niigata-u.repo.nii.ac.jp/record/1522/files/43_21_4157-4163.pdf
application/pdf
845.9 kB
2019-07-29