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Real-time displacement measurement using VCSEL interferometer
http://hdl.handle.net/10191/31149
http://hdl.handle.net/10191/31149122f1c83-d224-4564-a269-7c808d5ca535
名前 / ファイル | ライセンス | アクション |
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8563_85630K.pdf (4.6 MB)
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2014-12-18 | |||||
タイトル | ||||||
タイトル | Real-time displacement measurement using VCSEL interferometer | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Real-time displacement measurement using VCSEL interferometer | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | displacement sensor | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | laser diode | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | interferometer | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | vertical cavity surface emitting laser diode | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_5794 | |||||
タイプ | conference paper | |||||
著者 |
Suzuki, Takamasa
× Suzuki, Takamasa× Yamada, Noriaki× Sasaki, Osami× Choi, Samuel |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | A displacement sensor that uses a vertical cavity surface emitting laser (VCSEL), which is superior in terms of remediation of the mode-hop issue and modulation efficiency, is proposed. The interference signal in the sensor is processed with the phase-locked technique. This device allows real-time measurement of displacement. No unstable signals due to mode-hop were observed in the experiments. Displacement measurements recorded with this device indicated that it has an rms measurement accuracy of 0.3 μm and 50 nm for displacements of 150 μm and 1.2 μm, respectively. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Optical metrology and inspection for industrial applications 2 : 5-7 November 2012 : Beijing, China | |||||
書誌情報 |
Proceedings of SPIE - the International Society for Optical Engineering en : Proceedings of SPIE - the International Society for Optical Engineering 巻 8563, p. 85630K-1-85630K-6, 発行日 2012-11 |
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出版者 | ||||||
出版者 | International Society for Optical Engineering, SPIE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0277786X | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10619755 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/12.999720 | |||||
権利 | ||||||
権利情報 | Copyright(C)2012 Society of Photo-Optical Instrumentation Engineers | |||||
著者版フラグ | ||||||
値 | publisher |