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Scale-reduction rule without drop in the sensitivity of a silicon-based guided-wave optical pressure sensor using a micromachined diaphragm
http://hdl.handle.net/10191/31054
http://hdl.handle.net/10191/31054518575de-c813-4b0e-a2c3-568da67e916f
名前 / ファイル | ライセンス | アクション |
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51_1_014401.pdf (1.0 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2014-12-12 | |||||
タイトル | ||||||
タイトル | Scale-reduction rule without drop in the sensitivity of a silicon-based guided-wave optical pressure sensor using a micromachined diaphragm | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Scale-reduction rule without drop in the sensitivity of a silicon-based guided-wave optical pressure sensor using a micromachined diaphragm | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | integrated optics | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | pressure sensor | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | diaphragm | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | MOEMS | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | elasto-optic effect | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
著者 |
Ohkawa, Masashi
× Ohkawa, Masashi× Sato, Takashi |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | In this study, an original scale-reduction rule without a drop in the sensitivity of a guided-wave optical pressure sensor was obtained using a micromachined diaphragm. The sensor has a rectangular diaphragm as a pressure-sensitive structure and a sensing waveguide across the diaphragm. Its sensitivity is theoretically known to be strongly dependent on the dimensions of the diaphragm. According to the theoretical results, the sensitivity can be kept constant even if the diaphragm dimensions are reduced as long as both the aspect ratio and the characteristic length of the diaphragm remain constant. Here, the characteristic length is introduced as the cube of either width or length of the rectangular diaphragm divided by the square of its thickness. Such a scale-reduction rule would be very useful for miniaturizing a sensor without reducing sensitivity, although it has not been experimentally confirmed. In this study, the scale-reduction rule was experimentally examined using three fabricated sensors with the same aspect ratio and the same characteristic length. The measured sensitivities of the three sensors were quite similar to each other, as theoretically predicted. | |||||
書誌情報 |
Optical Engineering en : Optical Engineering 巻 51, 号 1, p. 014401-1-014401-6, 発行日 2012-01 |
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出版者 | ||||||
出版者 | International Society for Optical Engineering, SPIE | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00913286 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00333891 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1117/1.OE.51.1.014401 | |||||
権利 | ||||||
権利情報 | Copyright 2012 Society of Photo-Optical Instrumentation Engineers | |||||
著者版フラグ | ||||||
値 | publisher |