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遠心力による真空チャック面変形の実験およびFEM解析 (超精密加工と超精密工作機械<特集>)
http://hdl.handle.net/10191/5794
http://hdl.handle.net/10191/57945d376e84-12f1-45b4-9a8b-a5c48535827b
名前 / ファイル | ライセンス | アクション |
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9_0092.pdf (443.2 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2008-04-08 | |||||
タイトル | ||||||
タイトル | 遠心力による真空チャック面変形の実験およびFEM解析 (超精密加工と超精密工作機械<特集>) | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | 遠心力による真空チャック面変形の実験およびFEM解析 (超精密加工と超精密工作機械<特集>) | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Ultra Precision Machining | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Contact Problem | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Modeling | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Finite-Element Method | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Chuck | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Centrifugal Force | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Deformation | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Interface | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
その他のタイトル | ||||||
その他のタイトル | Experimental and Numerical Analyses of Change in Shape of Vacuum Chuck Surface due to Centrifugal Force | |||||
著者 |
横山, 和宏
× 横山, 和宏× 小林, 敬司× 森脇, 俊道× 鈴木, 賢治 |
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著者別名 | ||||||
識別子 | 45986 | |||||
識別子Scheme | WEKO | |||||
姓名 | Yokoyama, Kazuhiro | |||||
著者別名 | ||||||
識別子 | 45987 | |||||
識別子Scheme | WEKO | |||||
姓名 | Kobayashi, Keiji | |||||
著者別名 | ||||||
識別子 | 45988 | |||||
識別子Scheme | WEKO | |||||
姓名 | Moriwaki, Toshimichi | |||||
著者別名 | ||||||
識別子 | 45989 | |||||
識別子Scheme | WEKO | |||||
姓名 | Suzuki, Kenji | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | This paper deals with the change in shape of the front surface of vacuum chuck employed for ultra precision machining due to the centrifugal force generated by the rotation of the spindle. Displacement, change in shape of the front surface and the diametrical expansion of the chuck made of aluminum are analysed experimentally under several contact conditions. Deformation analyses of the chuck by FEM based on several models for the ordinary contact condition are also carried out to compare with the experimental result. It is clarified that the axial and radial deformations of the aluminum chuck agree well between the experiment and the FEM analysis based on a model with fixed contacts at the interface between the chuck and the spindle. Deformation of another type of chuck consisting of a combination of steel and aluminum parts is also analysed. | |||||
書誌情報 |
日本機械学会論文集. C編 en : 日本機械学会論文集. C編 巻 57, 号 542, p. 3280-3285, 発行日 1991-10 |
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出版者 | ||||||
出版者 | 日本機械学会 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 03875024 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00187463 | |||||
権利 | ||||||
権利情報 | 日本機械学会 | |||||
権利 | ||||||
権利情報 | 本文データは学会の許諾に基づくCiNiiからの複製である | |||||
著者版フラグ | ||||||
値 | publisher | |||||
異版である | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | URI | |||||
関連識別子 | http://ci.nii.ac.jp/naid/110002392666 |