A collimated line beam is incident at an oblique incident angle of 0.61 rad into an inner surface of a hydrodynamic bearing whose inner diameter and length are 3 mm and 3.5 mm, respectively. Lights reflected in specified directions from the inner surface are selected to obtain an optical field whose phase distribution is proportional to the inner surface profile. This optical field interferes with a reference optical field in a two-wavelength interferometer using a tunable external cavity laser diode. Shapes of grooves with depth of about 5 μm and width of about 0.15 mm formed on the inner surface can be measured with an error less than 0.3 μm.
内容記述
Optical inspection and metrology for non-optics industries : 3-4 August 2009 : San Diego, California, United States. : Aug 2009, San Diego, CA.
雑誌名
Proceedings of SPIE - the International Society for Optical Engineering
巻
7432
ページ
74320J-1 - 74320J-5
発行年
2009-08
出版者
International Society for Optical Engineering, SPIE
ISSN
0277786X
書誌レコードID
AA10619755
DOI
info:doi/10.1117/12.827352
権利
Copyright 2009 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer
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