An optical surface profile is measured with a laser diode Fizeau interferometer using a method of absolute measurement. Wavefront aberration in the interferometer causes an undesirable phase distribution in the interference signal. To eliminate this phase distribution, the object surface is shifted in two directions orthogonal to each other and the difference wavefront of the surface profile of the object is obtained. An absolute surface profile is estimated by representing the object surface with a polynomial function and by solving the difference equations with least-squares method.
内容記述
Optical metrology and inspection for industrial applications 2 : 5-7 November 2012 : Beijing, China
雑誌名
Proceedings of SPIE - the International Society for Optical Engineering
巻
8563
ページ
85630B-1 - 85630B-7
発行年
2012-11
出版者
International Society for Optical Engineering, SPIE
ISSN
0277786X
書誌レコードID
AA10619755
DOI
info:doi/10.1117/12.2000145
権利
Copyright(C)2012 Society of Photo-Optical Instrumentation Engineers
Absolute measurement of optical surface profile with a Fizeau interferometer
8563_85630B.pdf
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