Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control
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A linear CCD image sensor is used to electrically scan a measuring point and measure 1-D step-profiles in real time with a sinusoidal wavelength-scanning (SWS) interferometer using double feedback control. In this interferometer, the optical path difference (OPD) and the amplitude of the SWS are controlled so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. Two different step profiles with step heights of 1 and 20 μm, respectively, are measured with a measurement error of less than 8 nm. Measuring time for one measuring point is 0.04 s.
雑誌名
Optical Engineering
巻
43
号
6
ページ
1329 - 1333
発行年
2004-06
出版者
International Society for Optical Engineering, SPIE
ISSN
00913286
書誌レコードID
AA00333891
DOI
info:doi/10.1117/1.1737375
権利
Copyright 2004 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control
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