An inspection system for the surface-profile properties of an organic photoconductor (OPC) drum substrate is studied. Defective substrates have approximately 1-mm-period waves in their surface profiles along the axial direction. The slope distribution of the surface profile is measured with an optical inspection system, which detects the angular deflection of a laser beam scanned over the surface at a high speed of 15 mm/ms. To discriminate between good and defective substrates, a threshold decision is made on components of the experimentally measured power spectrum of the slope distribution around 1-mm spatial period. The inspection system provides the same results as visual inspection with an accuracy better than 6σ. The setup dose not require any vibration isolators, because of its short inspection time of 2 ms.
雑誌名
Optical Engineering
巻
45
号
1
ページ
013601-1 - 013601-5
発行年
2006-01
出版者
International Society for Optical Engineering, SPIE
ISSN
00913286
書誌レコードID
AA00333891
DOI
info:doi/10.1117/1.2150821
権利
Copyright 2006 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
In-process inspection of surface-profile properties by detecting a laser beam deflection
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